FABRICATION OF LOW-LOSS 45-DEGREES INTEGRATED MIRRORS ON DIELECTRIC OPTICAL WAVE-GUIDES

High-density low-loss dielectric optical intel connection is demonstra ted on a monomode optical waveguide compatible with microelectronics t echnology. Low-loss self-aligned integrated mirrors (SAIM) on a dielec tric (polyimide-silicon nitride-polyimide) optical waveguide have been fabricated Optimization of the reactive ion etching process has been made in order to obtain vertical, homogeneous etched sidewalls. Using such a process, 45 degrees integrated mirrors present reflection losse s of 0.6 dB at a 830-nm wavelength (quasi-TE mode). (C) 1995 John Wile y and Sons, Inc.