Surface self-diffusion on a polycrystalline gold surface has been meas
ured in the temperature range from 300 K up to 773 K using an atomic f
orce microscope (AFM). The so called single surface scratch method was
used for this study. A technique was developed to produce reproducibl
e surface scratches with the AFM. The analysis of these scratches was
made by AFM, too. So, with these methods the activation energy (0.4 eV
) of the surface diffusion process was deduced by time and temperature
dependent scratch profile measurements.