OXIDE-THICKNESS DEPENDENCE OF 2ND-HARMONIC GENERATION THICK THERMAL OXIDES ON SI(111)

Citation
Cw. Vanhasselt et al., OXIDE-THICKNESS DEPENDENCE OF 2ND-HARMONIC GENERATION THICK THERMAL OXIDES ON SI(111), Surface science, 333, 1995, pp. 1367-1371
Citations number
19
Categorie Soggetti
Chemistry Physical
Journal title
ISSN journal
00396028
Volume
333
Year of publication
1995
Part
B
Pages
1367 - 1371
Database
ISI
SICI code
0039-6028(1995)333:<1367:ODO2GT>2.0.ZU;2-P
Abstract
We show here that the oxide-thickness dependence of the s-polarized SH G from Si(111) covered with a thick thermal oxide is completely descri bed by multiple reflections in the oxide film. For the p-polarized res ponse, a strong enhancement with thickness is observed, which cannot b e explained in this way. These measurements show that one should be ca utious in analyzing the SHG from a buried interface, and carefully tak e into account the linear optics involved.