DESIGN AND IMPLEMENTATION OF A PRECISION MATERIAL HANDLING ROBOT CONTROL-SYSTEM

Robotic transfer of silicon wafers in semiconductor fabrication facili ties is becoming increasingly attractive. This paper discusses the ben efits of a DSP-based computed torque controller over standard PID algo rithms for a three degree of freedom, cleanroom material transfer mani pulator. Formulation of robot kinematics, dynamic modeling, and numeri cal simulation assist in the implementation of this nonlinear controll er. Simulation and experimental data correlate well and show that a fa ctor of 2-3 times improvement in performance can be obtained.