THE VOID FRACTION OF RF-SPUTTERED SRTIO3 FILM CHARACTERIZED BY SPECTROSCOPIC ELLIPSOMETRY

Authors
SHON PK JEONG BS PARK HL
Citation
Pk. Shon et al., THE VOID FRACTION OF RF-SPUTTERED SRTIO3 FILM CHARACTERIZED BY SPECTROSCOPIC ELLIPSOMETRY, Solid state communications, 95(9), 1995, pp. 609-612
Citations number
13
Categorie Soggetti
Physics, Condensed Matter
Journal title
Solid state communications → ACNP
ISSN journal
00381098
Volume
95
Issue
9
Year of publication
1995
Pages
609 - 612
Database
ISI
SICI code
0038-1098(1995)95:9<609:TVFORS>2.0.ZU;2-G
Abstract
RF-sputtered SrTiO3 thin film was investigated by Spectroscopic Ellips ometry. The spectra calculated by using Brugman-Effective Medium Appro ximation theory compared with the experimental curves for delta and ps i of SrTiO3 thin films. Good agreement was found between experimental and calculated curves. The effective void fraction obtained in experim ents is 28-38 % with difference thickness of SrTiO3 films. The decreas e in void fraction with increasing O-2 pressure during reactive sputte ring growth was explained in terms of non-stoichiometry of the oxygen.