Tw. Preist et al., PERIODIC MULTILAYER GRATINGS OF ARBITRARY SHAPE, Journal of the Optical Society of America. A, Optics, image science,and vision., 12(8), 1995, pp. 1740-1748
We obtain the optical response of a multilayered system in which the i
nterfaces have a common periodicity but arbitrary shape by extending a
published method previously restricted to interfaces with identical p
rofiles [J. Opt. Sec. Am. 72, 839 (1982)]. Numerical comparisons with
other modeling results for grating systems are presented that show the
effectiveness of the new method.