A RADIALLY RESOLVED EXPERIMENTAL INVESTIGATION OF THE ELECTRON-ENERGYDISTRIBUTION FUNCTION IN A MICROWAVE-DISCHARGE SUSTAINED BY PROPAGATING SURFACE-WAVES

Radially resolved probe measurements of the electron energy distributi on function have been performed in an argon discharge sustained by a p ropagating surface wave. Good agreement between the electron energy di stribution function measured at the axis of the discharge and numerica l results from kinetic modelling of a surface-wave-produced plasma is found. The radial variations of the average electron energy and the fr equencies of different processes initiated by electron impact are calc ulated. On the basis of the local electron energy balance, electric fi eld intensity maintenance variations are estimated.