PREPARATION AND PROPERTIES OF A CAPACITOR STRUCTURE FORMED BY DOUBLE-SIDED YBA2CU3O7-X FILMS ON SRTIO3 SUBSTRATE

The preparation of high-temperature superconducting YBa2Cu3O7-x thin f ilms on both sides of the SrTiO3 substrate by DC magnetron sputtering is reported. The films on both sides of the substrate exhibited well-o riented crystalline structure with the c axis normal to the substrate surface, T-c = 80-91 K and R(s) less than 0.05 Omega at 77 K and 60 GH z. The properties of the resultant SrTiO3 capacitor with YBCO electrod es were examined at frequency of 1 GHz. The following parameters were obtained: relative dielectric permittivity of 4 x 10(3) at 77 K and di electric loss tangent of 3 x 10(-4) at 77 K. No hysteresis in the depe ndence of the capacitance on the cc bias voltage was observed.