SUPERCONDUCTING MICROPROBE AT BOCHUM

Authors
MEIJER J STEPHAN A ADAMCZEWSKI J ROCKEN H BUKOW HH ROLFS C
Citation
J. Meijer et al., SUPERCONDUCTING MICROPROBE AT BOCHUM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 423-426
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
99
Issue
1-4
Year of publication
1995
Pages
423 - 426
Database
ISI
SICI code
0168-583X(1995)99:1-4<423:SMAB>2.0.ZU;2-N
Abstract
The ion optical properties of a new heavy ion microprobe (with a super conducting lens) are described, including the determination of the len s errors, methods to characterize a lens misalignment, and operational results. These properties are important for the application of analyt ical techniques (RES, PIXE and NRA) as well as for the modification (i mplantation) of samples on the micrometer scale.