Jd. Meyer et al., NUCLEAR-REACTION CHANNELING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 440-443
Nuclear reaction channeling (NRC) provides a tool for the investigatio
n of concentration and lattice location of impurities in a crystal. In
this work NRC is applied to the analysis of light element impurities
(B, C, N,O) in semiconductor materials (GaAs, Si). Depending on the nu
clear reaction used for the investigation, concentrations below 100 pp
ma are analysed. The channeling angular scans in different crystalline
directions allow to specify the site of the impurities up to a range
of the thermal vibration amplitude of the host crystal. These results
are deduced from the MABIC simulation code.