QUANTITATIVE ELASTIC RECOIL DETECTION

Quantitative depth profiles of light and medium heavy elements can be obtained by elastic recoil detection analysis (ERDA) with heavy ions d ue to well known scattering cross sections and stopping powers. Howeve r, the transformation of the measured spectra (count rate versus energ y) into concentration profiles is a nontrivial task in general. Theref ore, based on a similar algorithm for the transformation of RBS-spectr a a matrix algorithm was developed which allows to transform ERDA-spec tra directly into depth profiles. This procedure can also be used to c alculate depth profiles from high resolution experiments where a depth resolution better than 1 nm can be achieved. An example of ERDA-measu rements demonstrates the performance of this method in determining qua ntitative depth profiles.