N. Yu et al., IN-SITU CAPABILITY OF ION-BEAM MODIFICATION AND CHARACTERIZATION OF MATERIALS AT LOS-ALAMOS-NATIONAL-LABORATORY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 566-568
The capability of in-situ ion beam modification and characterization o
f materials developed at Los Alamos National Laboratory is described.
A beam-line from a 3 MV tandem accelerator and a beam-line from a 200
kV ion implanter are joined together in an in-situ target chamber. The
chamber is equipped with a cold and hot sample stage with a temperatu
re range from - 100 to 500 degrees C. The angular (sample spin and bas
al rotation) motions and translational motions of the sample stage are
controlled by a multi-axis goniometer. This chamber provides a unique
capability to conduct a temperature dependent experiment of ion irrad
iation and sequential backscattering and channeling analysis. The effi
ciency and reliability of in-situ ion beam techniques are demonstrated
by two examples, irradiation damage in (100) MgAl2O4 spinel crystals
and ion-beam-induced densification of zirconia sol-gel thin films.