AUGER-ELECTRON DIFFRACTION IN THE LOW KINETIC-ENERGY RANGE - THE SI(111)7X7 SURFACE RECONSTRUCTION AND GE SI INTERFACE FORMATION/

Citation
M. Decrescenzi et al., AUGER-ELECTRON DIFFRACTION IN THE LOW KINETIC-ENERGY RANGE - THE SI(111)7X7 SURFACE RECONSTRUCTION AND GE SI INTERFACE FORMATION/, Physical review. B, Condensed matter, 52(3), 1995, pp. 1806-1815
Citations number
48
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
01631829
Volume
52
Issue
3
Year of publication
1995
Pages
1806 - 1815
Database
ISI
SICI code
0163-1829(1995)52:3<1806:ADITLK>2.0.ZU;2-4
Abstract
We have investigated the Anger-electron diffraction (AED) of the L(2,3 ) VV Auger line of the clean 7 X 7 reconstructed Si(111) surface and t he Ge/Si interface formed after a few monolayers (ML) of Ge deposition . The experimental AED in the low kinetic-energy regime has been inter preted within the framework of a multiple-scattering theory. The compa rison of the AED data taken using both the x-ray source and an electro n source evidences that the incident beam plays a negligible role when the experimental conditions require the use of an angular detector. T he evolution of the Ge/Si(lll) interface is studied by monitoring the intensity anisotropy of the Auger peaks of the two elements at room te mperature (RT) and at 400 degrees C annealing temperature of the subst rate. The evolution of the growth mechanism underlying the Ge/Si inter face formation has been studied by exploiting the very low electron es cape depth of this technique (less than or equal to 5 Angstrom). While at RT two monolayers of Ge deposition appear uniform and amorphous, t he successive annealing induces an intermixing and a recrystallization only in the first two layers of the interface without any further int erdiffusion. Furthermore, a Stranski-Krastanow growth mode has been de duced after deposition of 4 ML of Ge on a clean Si sample kept at 400 degrees C.