THE PLASMA CHEMISTRY REFLECTED IN THE ELECTRICAL CHARACTERISTICS OF SYSTEMS FOR THE DIAMOND SYNTHESIS

The paper presents experimental data of cold plasma systems for differ ent methane/carbon dioxide and acetone/water mixtures. These mixtures can be used for the thin film depositions with diamond or DLC (diamond like carbon) structures. The characteristic curves (current versus vo ltage) of DC (direct current) discharges were studied. Experimental po ints were selected in the DLC domain (from C/H/O diagram) and outside it. The breakdown voltage is strongly dependent ori methanol/carbon di oxide ratio. The diamond domain shows no noticeable correlation with t he breakdown voltage, iir constant voltage, the curves of current disc harge versus mixture feed fractions present some local extremes in the diamond domains. One can assume that elemental composition of reactio n feed and plasma products art: correlated over the domain of low part icle density.