QUANTUM-WELL INTERMIXING WITH HIGH SPATIAL SELECTIVITY USING A PULSED-LASER TECHNIQUE

The authors demonstrate a new quantum well intermixing technique which allows bandgap shifts of typically 100meV to be realised with a high spatial resolution in a GaInAs/GaInAsP MQW waveguide structure. The ma terial was irradiated with pulses from a Q-switched Nd:YAG laser, and was then subjected to rapid thermal annealing at 700 degrees C for sev eral minutes. The spatial resolution of the disordering process was in vestigated across a masked interface, and was determined to be less th an or equal to 25 mu m.