MASS SENSITIVITY OF TEMPERATURE-STABILIZED SURFACE-ACOUSTIC-WAVE DELAY-LINES ON GAAS

Sensors using monolithically integrated acoustic and electronic compon ents assembled on the same substrate require special arrangements for the temperature stabilization of the oscillator frequencies. We discus s the temperature stabilization and mass sensitivity of Rayleigh waves on {100} GaAs crystals cut in the [110] propagation direction. The te mperature compensation is investigated for a GaAs/SiO2/Au layered stru cture. Additionally, a mass-sensitive organic layer is considered. We show that a temperature-compensated mass-sensitive device can be reali zed. The temperature coefficient of delay (TCD) and the temperature co efficient of frequency (TCF) are calculated. Better temperature compen sation than for ST-X quartz can be achieved.