AN AMPEROMETRIC MICROSENSOR ARRAY WITH 1024 INDIVIDUALLY ADDRESSABLE ELEMENTS FOR 2-DIMENSIONAL CONCENTRATION MAPPING

Authors
HINKERS H HERMES T SUNDERMEIER C BORCHARDT M DUMSCHAT C BUCHER S BUHNER M CAMMANN K KNOLL M
Citation
H. Hinkers et al., AN AMPEROMETRIC MICROSENSOR ARRAY WITH 1024 INDIVIDUALLY ADDRESSABLE ELEMENTS FOR 2-DIMENSIONAL CONCENTRATION MAPPING, Sensors and actuators. B, Chemical, 24(1-3), 1995, pp. 300-303
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
24
Issue
1-3
Year of publication
1995
Pages
300 - 303
Database
ISI
SICI code
0925-4005(1995)24:1-3<300:AAMAW1>2.0.ZU;2-X
Abstract
Microsensor arrays with 1024 individually addressable amperometric cel ls are presented. The arrays have been realized in silicon planar tech nology on 10 mmx10 mm and 30 mmx30 mm substrates with separated hydrog el membranes. The single sensor cell behaviour as well as the behaviou r of the complete array have been investigated. To demonstrate the per formance of the devices, a two-dimensional oxygen concentration mappin g is presented.