A nondestructive technique that provides near-field measurements as we
ll as refractive index profiles and geometry of waveguides in LiNbO3 w
ithin a few minutes is demonstrated. It is a modification of the refra
cted-near-field (RNF) method well known for optical fiber characteriza
tion. Spatial resolution below 1 mu m is achieved. The index resolutio
n is about 2x10(-4), the reproducibility better than 7%. A new calibra
tion method for RNF measurement is introduced.