MATERIAL AND DESIGN CONSIDERATIONS FOR LOW-POWER MICROHEATER MODULES FOR GAS-SENSOR APPLICATIONS

A large number of gas-sensitive materials like semiconducting metal ox ides operate only at elevated temperatures. A new type of low-power mi croheater module based on new materials (such as diamond-like carbon o r silicon carbide) is investigated. Simulation methods (finite-element method, FEM) are used to compare different types of concepts for low- power microheater modules. The thermal behaviour of membranes with dif ferent material combinations and the mechanical stress induced into a thin membrane at elevated temperatures are analysed by simulation. The advantage of using new materials like diamond, diamond-like carbon or silicon carbide films in these fields will be demonstrated and a prop osal for realization is given. The benefit of extensive simulation stu dies in the approach is to minimize the costs for development, especia lly in sensitive fields of research and development.