CA-CATALYZED AND PT-CATALYZED THIN-FILM SNO2 GAS SENSORS FOR CO AND CO2 DETECTION

Authors
STEINER K HOEFER U KUHNER G SULZ G WAGNER E
Citation
K. Steiner et al., CA-CATALYZED AND PT-CATALYZED THIN-FILM SNO2 GAS SENSORS FOR CO AND CO2 DETECTION, Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 529-531
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
25
Issue
1-3
Year of publication
1995
Pages
529 - 531
Database
ISI
SICI code
0925-4005(1995)25:1-3<529:CAPTSG>2.0.ZU;2-N
Abstract
Pt-, Ca- and Pt/Ca-catalyzed thin-film SnO2 gas sensors have been stru ctured on Si substrates. The sensors are temperature stable at 900 deg rees C in synthetic air for 48 h. No significant outdiffusion of the s ensor layers or peeling effects can be observed after annealing. Pt/Ca catalyst combinations reduce the sensor-signal drift. Pt/Ca-catalyzed sensors show a weak CO2 gas response. Ca catalysts lead to a strong N H3 response.