DEVELOPMENT OF A HIGH-TEMPERATURE BASIC DEVICE FOR CHEMICAL SENSORS BASED ON AN IDC WITH ON-CHIP HEATING

A device for chemical sensors has been developed based on a thin-film interdigital capacitor (IDC) with on-chip heating for temperatures up to 450 degrees C. Tire concept of direct heating of the sensor reduces the heating power significantly. Furthermore good control of the oper ating temperature and its uniformity can be obtained under various ope rating conditions. On the basin of a refined finite-element analysis s imulation model, two heater elements have been designed for operating temperatures of 200 and 380 degrees C. The beating powers are 1.2 and 3.5 W and the maximum temperature deviations across the IDC area are /- 2.6 and +/- 2.8%, respectively.