DARK CURRENTS IN PIN PHOTODETECTORS FABRICATED BY PREPROCESSING AND POSTPROCESSING TECHNIQUES OF EPITAXIAL LIFTOFF

Citation
J. Justice et al., DARK CURRENTS IN PIN PHOTODETECTORS FABRICATED BY PREPROCESSING AND POSTPROCESSING TECHNIQUES OF EPITAXIAL LIFTOFF, Electronics Letters, 31(16), 1995, pp. 1382-1383
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
ISSN journal
00135194
Volume
31
Issue
16
Year of publication
1995
Pages
1382 - 1383
Database
ISI
SICI code
0013-5194(1995)31:16<1382:DCIPPF>2.0.ZU;2-E
Abstract
A comparison is made between the dark currents in mesa isolated InGaAs pin photodetectors. The detectors are Fabricated in three ways: on a substrate, by transfer of fabricated photodetectors onto a silicon sub strate. and by fabrication of devices on posttransferred material. A 4 x 10 array of functioning devices is described.