InGaAs:Fe/InP:Fe metal-semiconductor-metal (MSM) photo-detectors for t
he long wavelength region were transferred by epitaxial liftoff (ELO)
techniques onto an Si substrate. The transferred detectors, with a fin
ger spacing and width of 1.5 and 1.0 mu m, respectively, showed no det
erioration in device performance. A fast impulse response with an FWHM
of 23 ps and an external quantum efficiency of 48% was measured at a
7V bias and 1.3 mu m wavelength. The leakage current was 250nA at a 7V
bias.