A 1.3-mu m wavelength, InGaAsP-InP folded-cavity, surface-emitting las
er with CH4-H-2 reactive ion-etched vertical and 45 degrees angled fac
ets was demonstrated for the first time, Continuous-wave threshold cur
rents of 32 mA have been achieved,,vith >15 mW CW power for the surfac
e-emitted light. These surface-emitting lasers with two dry-etched fac
ets are suitable for wafer-level testing and for monolithic integratio
n with other M-based photonic devices.