INTERFACE STATE MEASUREMENTS BY THE DLS-82E LOCK-IN SPECTROMETER

Authors
DMOWSKI K VUILLAUME D LEPLEY B LOSSON E BATH A
Citation
K. Dmowski et al., INTERFACE STATE MEASUREMENTS BY THE DLS-82E LOCK-IN SPECTROMETER, Review of scientific instruments, 66(8), 1995, pp. 4283-4288
Citations number
71
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
8
Year of publication
1995
Pages
4283 - 4288
Database
ISI
SICI code
0034-6748(1995)66:8<4283:ISMBTD>2.0.ZU;2-7
Abstract
A calculation procedure to determine the energy distribution of interf ace states from the deep level transient spectroscopy spectrum measure d in metal-insulator-semiconductor structures by means of the DLS-82E lock-in spectrometer is described. Interface states in metal-boron nit ride-WP and metal-oxide-Si capacitors have been examined by the DLS-82 E spectrometer to demonstrate the practical application of the propose d procedure. (C) 1995 American Institute of Physics.