PLANARIZED PATTERNING OF Y-BA-CU-O THIN-FILMS FOR MULTILAYER TECHNOLOGY

Planarized layers of YBa2Cu3O7 (YBCO) were made by etching trenches in SrTiO3 (STO) substrates laser depositing a YBCO film mechanically pol ishing film down to the substrate surface. These structures exhibited critical temperatures (T-c) of 88 K and a critical current density (J( c)) of 10(6) A/cm(2) at 77 K. The planarized surface was smooth, with a maximum height difference between the YBCO STO of 20 nm. The surface s were used as templates for epitaxial growth of multilayer insulators of STO and PrBa2Cu3O7 (PBCO) and top YBCO layers. Complete crossovers , free of superconducting shorts, with T-c of 86 K and critical curren t density (J(c)) of 2x10(5) A/cm(2) were made.