We have measured the microwave properties of high quality YBCO thin fi
lms using a copper cavity (87GHz) and a dielectric resonator (19GHz) f
or unpatterned films as well as a coplanar resonator (5, 8, 10, 15 and
16GHz) for patterned films. For the patterned films the surface resis
tance (R(s)) and non-linear effects were studied as a function of temp
erature below T-c. For practical applications, the assessment of non-l
inear effects in the surface resistance are of great importance. The b
est films showed R(s) approximately constant up to microwave peak curr
ent densities of the order of the dc critical current density. The mea
surements were performed on samples fabricated by a number of differen
t techniques.