HEATING OF LARGE-AREA SUBSTRATES FOR IN-SITU DEPOSITION OF YBCO

We have developed a radiant technique far substrate heating which we f ound particularly useful for the in situ deposition of high temperatur e superconducting films, Using this technique, large area YBa2Cu3Ox fi lms were deposited, using off-axis sputter deposition, onto lanthanum aluminate and sapphire substrates, the latter using an yttria-stabiliz ed zirconia buffer layer, For both types of substrates we were able to obtain c-axis oriented films, The dc and microwave properties of the films deposited on lanthanum aluminate are presented along with the dc measurements of the films deposited on sapphire, The motivation for e mploying this method of heating are discussed, along with our current plans for scaling up the process to produce even larger area films.