STUDY OF THE EFFECT OF CHOPPING ON THE ADHESION OF CODEPOSITED MIXED THIN-FILMS

This paper reports adhesion of codeposited mixed films of Cu-Ag, Cu-Al , MgF2-ZnS and MgF2-cryolite and enhancement of adhesion by chopping t echnique. Results indicate that codeposited mixed films show higher ad hesion than single films and. chopping improves the adhesion further. The quenching of crystal growth seems to be more effective if two mate rials are codeposited and chopped. Chopping along with mixing increase s the number of nucleation sites and decreases defects in the film. De creasing defects and modifying the microstructure increases the adhesi on of the films. Chopping also seems to increase oxygen affinity of bo th metallic and dielectric films for growth of interfacial bonding lay er.