PHOTO-CVD SILICON-NITRIDE THIN-LAYERS AS PH-ISFET SENSITIVE MEMBRANE (VOL 18, PG 342, 1994)

Authors
ROCHER V POYARD S JAFFREZICRENAULT N AJOUX C LEMITI M
Citation
V. Rocher et al., PHOTO-CVD SILICON-NITRIDE THIN-LAYERS AS PH-ISFET SENSITIVE MEMBRANE (VOL 18, PG 342, 1994), Sensors and actuators. B, Chemical, 28(1), 1995, pp. 82-82
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
28
Issue
1
Year of publication
1995
Pages
82 - 82
Database
ISI
SICI code
0925-4005(1995)28:1<82:PSTAPS>2.0.ZU;2-I