RAMAN-SPECTROSCOPIC CHARACTERIZATION OF T HIN CARBON-FILMS

The microstructural growth of amorphous carbon layers is mainly determ ined by substrate parameters. Changes of the plasma parameters hardly influence the structure of the layer. Low substrate temperatures and a normal deposition angle favour the formation of diamond-like features . Diamond-like properties can be further increased by subsequent impla ntation of more than 10(16) carbon ions of medium energy (20 eV) per c m(3). The decrease of the graphite clusters in respect of their portio n and/or their size can be observed in the Raman spectra before change s of the layer hardness become mechanically evident.