MO CVD OF NOBLE-METALS

The state of the art in research and application of processes of chemi cal vapour deposition of noble metal (Pt, Pd, Rh, Ir, Ru, Au) coatings is considered. Systematization of known experimental data on synthesi s, thermal properties and saturated vapour pressure of volatile compou nds of noble metals with organic ligands is provided. The processes of CVD of noble metals were analized from general requirements to precur sors. It is shown that chelate or mixed-ligand noble metal complexes a nd, in particular beta-diketonate derivatives due to their thermal pro perties are the most suitable for deposition of noble metal thick film s.