DESIGN OF ZR(IV) AND HF(IV) COORDINATION-COMPOUNDS - PRECURSORS FOR MOCVD SYNTHESIS OF PROTECTIVE COATINGS

Design and creation of new materials with unusual, predictable or pred eterminated properties become one of the most actual problems of modem applied chemistry. Main demands are discussed, which are made to chem ical compounds used in CVD synthesis of functional materials. A divisi on of volatile metal-containing precursors into main classes is given. On the basis of volatility and thermal stabiliti criteria elaborated at IGIC-NASU, we have designed synthesized and characterized a series of new advanced precursors for Zr(IV) and Hf(IV). Their properties are compared to those of known species. A possibility of formation of req uested properties and structure of final materials is shown.