VOLATILE METALS COORDINATION-COMPOUNDS AS PRECURSORS FOR FUNCTIONAL MATERIALS SYNTHESIS BY CVD-METHOD

The applications of such coordination compounds (chelates) as metal be ta-diketonates in different CVD techniques were examined. It was shown that high chemical and physical characteristics of these compounds al low their favourable use comparatively with other volatile compounds. The general rules in volatility and thermal stability of beta-diketona tes and their fluorine derivatives were discussed. The ways of prepara tion of various functional materials with specific properties were det ermined.