A dynamic model combining molecular kinetic theory and classical nucle
ation theory was used to simulate the heterogeneous vapor-to-crystal p
hase transition in a closed vacuum chamber at low substrate temperatur
e, The governing equations for the moles of molecules adsorbed to the
substrate, the pressure in the chamber, and the number and mass of the
crystals formed were simultaneously integrated. The model showed that
the heterogeneous phase transition changed from one controlled by cry
stal growth to one controlled by heterogeneous nucleation as the conde
nsation coefficient decreased, On the basis of the observation and the
assumption for the adherence between the crystals and the substrate s
urface to be incomplete, the substrate temperature and the crystal sur
face temperature, respectively, were raised by 0.4K and by 1K at the o
nset of nucleation in the model computation, The changes in vapor pres
sure with elapsed time in the computed results agreed reasonably well
with the experimental ones.