Thermally cracked nitric oxide (NO) has been used to grow heavily dope
d p-type ZnSe layers. Net acceptor densities as high as similar to 4 X
10(18) cm(-3) were obtained, as determined by capacitance-voltage pro
filing, in molecular beam epitaxial growth at 250 degrees C. Cracker e
fficiency as a function of temperature and the nitric oxide flow rate
is discussed and correlated with the doping level in the epitaxial lay
er. (C) 1995 American Institute of Physics.