SURFACE-RELIEF PHASE STRUCTURES GENERATED BY LIGHT-INITIATED POLYMERIZATION

A method for fabricating refractive micro-optical elements by structur ing poly(methyl methacrylate) layers is presented. With this flexible and simple method a surface growth of several micrometers can be achie ved. For smooth surface reliefs a nearly linear response of the phase growth to the UV intensity can be achieved over a range of 8 pi. The e dge steepness depends on the maximum height and can reach values as hi gh as 2 pi above 4 mu M. We describe the fabrication process, establis h a mathematical model of the surface growth, and also present as expe rimental results some components fabricated by this method.