A STUDY OF UNCERTAINTIES AT CALIBRATION OF VACUUM GAUGES

Authors
JENKO B POVH B SETINA J
Citation
B. Jenko et al., A STUDY OF UNCERTAINTIES AT CALIBRATION OF VACUUM GAUGES, Vacuum, 46(8-10), 1995, pp. 817-820
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
46
Issue
8-10
Year of publication
1995
Pages
817 - 820
Database
ISI
SICI code
0042-207X(1995)46:8-10<817:ASOUAC>2.0.ZU;2-N
Abstract
A primary calibration system for calibration of vacuum gauges from atm ospheric pressure down to 10(-5) Pa was built several years ago. The p ressure generation in the calibration system in the range from 10(-1) to 10(-3) Pa by a dynamic expansion method is described with stress on long term stability (over 7 years) and on the calculated uncertaintie s. The two chamber vacuum system is coupled through an orifice in a th in plate with calculated conductance. The gas flow is determined by a porous plug of sintered silicon carbide which separates the high and t he rough vacuum chamber. Detailed analysis of uncertainty of all influ ential quantities is presented. The measurements after several years a re compared.