The effect of the metal, semiconductor and interface parameters on the
Schottky barrier height is analysed in order to determine whether the
lateral distribution of the barrier height obeys a normal or the logn
ormal law. It is found that the fluctuations of some parameters result
in a normal lateral distribution, while the fluctuations of the other
s yield a lognormal lateral distribution of the Schottky barrier heigh
t. It is shown that the only available experimental barrier height dis
tribution may be explained by a superposition of two lognormal distrib
utions.