ELECTRON-BEAM MIXING W1-XSIX SI MULTILAYERS

Authors
VAVRA I WALLENBERG LR KUDRYASHOV VA
Citation
I. Vavra et al., ELECTRON-BEAM MIXING W1-XSIX SI MULTILAYERS, Vacuum, 46(8-10), 1995, pp. 1063-1064
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
46
Issue
8-10
Year of publication
1995
Pages
1063 - 1064
Database
ISI
SICI code
0042-207X(1995)46:8-10<1063:EMWSM>2.0.ZU;2-N
Abstract
The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the applicati on in nanometer-scale technology.