LASER-CVD 3D RAPID PROTOTYPING OF LASER-DRIVEN MOVEABLE MICRO-OBJECTS

Using continuous wave visible (514 nm, 488 nm) laser beams and the gas eous precurcsors trimethylamine alane (CH3)(3)NAlH3 and oxygen, free-s tanding three-dimensional (3D) Al2O3 ceramic microstructures can be di rectly written under software control. By suitable laser irradiation, parts of these 3D microobjects can be moved through thermal expansion forces. This is a first step towards laser rapid prototyping of optica lly driven 3D microobjects such as microtweezers and microrobots. Exam ples will be presented.