A COMPARATIVE-STUDY OF IRON-BASED FILM DEPOSITION FROM IRON PENTACARBONYL AT 248 NM AND 488 NM

Thin film deposition by laser irradiation of Fe(CO)(5) at two radiatio n wavelengths (248 nm and 488 nm) was performed. A perpendicular geome try of irradiation was used. Maximum deposition rates of 14 Angstrom/s at lambda = 248 nm and 1.5 Angstrom>/s at lambda = 488 nm were obtain ed, indicating a diffusion limited process. SEM analysis of film morph ologies showed significant differencies in the nucleation and growth o f films deposited at 248 nm and 488 nm. XPS surface analysis revealed a higher carbon content and carbidic phases in the surface of films de posited at 488 nm on SiO2 (quartz) substrates. Oxidized surface Fe pha ses were found in films, with increasing the exposure time to laser ra diation. The film properties are discussed in connection with irradiat ion conditions and specific mechanisms involved.