A MODEL FOR RECTANGULAR MINIATURIZED MICROPHONES

The aim of this paper is to provide us with an accurate electrical net work for rectangulary shaped, miniaturized microphones, based on a new model recently developed to describe the coupling between a vibrating membrane and a fluid film. The results obtained concerning the freque ncy response and the behaviour of the membrane of a square miniaturize d microphone (having a smooth rigid backing electrode and a surroundin g cavity) are presented for the frequency range from zero to just beyo nd the first resonant frequency of the system.