MOO3 THIN-FILMS PREPARED VIA MOCVD FROM A VOLATILE MOLYBDENYL COMPLEX

Authors
BALLARIN B BRESCACIN E RIZZI GA TONDELLO E
Citation
B. Ballarin et al., MOO3 THIN-FILMS PREPARED VIA MOCVD FROM A VOLATILE MOLYBDENYL COMPLEX, Journal of materials chemistry, 5(8), 1995, pp. 1147-1150
Citations number
21
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Journal of materials chemistry → ACNP
ISSN journal
09599428
Volume
5
Issue
8
Year of publication
1995
Pages
1147 - 1150
Database
ISI
SICI code
0959-9428(1995)5:8<1147:MTPVMF>2.0.ZU;2-U
Abstract
A volatile molybdenyl complex of formula MoO2(dpm)(2) has been studied as a precursor for MOCVD of MoO3 films. Qualitative indications on th e possible decomposition path were obtained by mass spectrometry and t hermal analysis. Good quality films were deposited using Pt and Si(100 ) as substrates. The films were characterised by X-ray photoelectron s pectroscopy (XPS), X-ray diffraction (XRD), scanning electron microsco py (SEM), IR and UV-VIS spectroscopies.