NANOFABRICATION OF A 2-DIMENSIONAL ARRAY USING LASER-FOCUSED ATOMIC DEPOSITION

Fabrication of a two-dimensional array of nanometer-scale chromium fea tures on a silicon substrate by laser-focused atomic deposition is des cribed. Features 13 +/- 1 nm high and having a full-width at half maxi mum of 80 +/- 10 nm are fabricated in a square array with lattice cons tant 212.78 nm, determined by the laser wavelength. The array covers a n area of approximately 100 mu m X 200 mu m. Issues associated with la ser-focusing of atoms in a two-dimensional standing wave are discussed , and potential applications and improvements of the process are menti oned.