LIGHT-SCATTERING FROM THIN-FILMS WITH AN OBLIQUE COLUMNAR STRUCTURE AND WITH GRANULAR INCLUSIONS

Two different types of inhomogeneity of optical thin films resulting f rom the deposition conditions are considered to be the origin of volum e scattering. With the use of a theory based on a first-order Born app roximation, both structure types can be treated easily. In the case of an oblique columnar structure, the light-scattering patterns show a p ronounced anisotropy and a strong dependence on the side at which the Light enters the sample. As explanation of these facts, the role of th e four partial scattering processes inside the film is revealed, leadi ng to a simple diffraction model that reproduces the main scatter feat ures and makes the individual physical processes involved more obvious . Inclusions without any preferred orientation only contribute to othe r isotropic background scatter sources such as roughness, allowing the use of anisotropic scatter for investigations of structure.