COMPARISON OF CHANNELING TRAJECTORIES AND RANGES CALCULATED BY THE CONTINUUM POTENTIAL APPROXIMATION AND CRYSTAL-TRIM

Authors
LIU QKK BIERSACK JP POSSELT M
Citation
Qkk. Liu et al., COMPARISON OF CHANNELING TRAJECTORIES AND RANGES CALCULATED BY THE CONTINUUM POTENTIAL APPROXIMATION AND CRYSTAL-TRIM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 102(1-4), 1995, pp. 3-6
Citations number
8
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
102
Issue
1-4
Year of publication
1995
Pages
3 - 6
Database
ISI
SICI code
0168-583X(1995)102:1-4<3:COCTAR>2.0.ZU;2-R
Abstract
The usefulness of the continuum potential approximation for the study of ion implantation in Si crystals has been investigated. The results of range profile and some selected trajectories in proton-Si[110] chan neling using the continuum potential to approximate the ion-atom inter action in the channel are compared with the Crystal-TRIM code. The agr eement is excellent overall. The weaknesses of the continuum potential method are pointed out. The applicability of this method to the cases with heavier projectile, e.g., B, P, or As, is discussed.