ROUND-ROBIN COMPUTER-SIMULATION OF ION TRANSMISSION THROUGH CRYSTALLINE LAYERS

Round robin computer simulations were performed by 11 groups using 6 d ifferent molecular dynamics codes and 6 different binary collision app roximation codes. The process simulated is the transmission of 0.2 keV , 0.5 keV, and 1.0 keV B atoms through 9 monolayers of [001]Si and the transmission of 1.0 keV Ar atoms through 5 monolayers of [001]Cu. In all cases the energy distribution and the angular distribution of the transmitted atoms have been calculated with and without taking into ac count the interaction between the target atoms. The results of the sim ulations with the different molecular dynamics codes are in good agree ment. The binary collision approximation results are compared with eac h other and with the molecular dynamics data. Deviations are discussed . It is concluded that the binary collision concept is still applicabl e for such low energies if simultaneous collisions are taken into acco unt.