GENERATION OF RESIDUAL DEFORMATIONS BY PULSED ION-IMPLANTATION

The generation of residual deformations on AISI 316 stainless steel su bmitted to pulsed ion implantation by means of a plasma focus device w as investigated. It is shown that the residual deformation can be attr ibuted to thermal stresses induced in the target by the strong and fas t heating process due to the accelerated ions. A numerical simulation is presented as an attempt to explain the generation of these deformat ions. The model is based on the computation of the temperature distrib ution in the implanted zone and the calculation of the induced thermal stresses. The mechanical response of the whole specimen is then evalu ated using the finite-element method. Numerical results are compared w ith those measured by means of a holographic method and reasonable agr eement is obtained.