RANGE DISTRIBUTION OF IMPLANTED F-19 IONS IN TITANIUM

The F-19 (p, alpha gamma)O-16 resonance nuclear reaction at E(R) = 872 , 1KeV was used to measure the depth profiles of implanted F-19(+) in titanium samples. A proper convolution calculation procedure was used to extract the depth profiles of fluorine from the experimental excita tion yield curves. The range parameters, R(p) and Delta R(p) obtained in this work were compared with those obtained by Monte Carlo simulati on with TRIM'90 code as well as a computer code developed recently in this group.